Comparison of Anisotropic Etching with KOH and TMAH for Silicon Nanostructures Fabrication
碩士 === 國立暨南國際大學 === 電機工程學系 === 92 === A lot of nanostructures and nanodevices have been reported by combination of scanning probe lithography and anisotropic wet etching techniques in the recent years. Anisotropic wet etching became one of the key technologies for nanofabrication. The pur...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/26751462539944533403 |