The Construct of New Cluster Index for Wafer Defects
碩士 === 國立交通大學 === 工業工程與管理系 === 92 === Yield is the important index to evaluate the product quality or the capability of manufacturing process for Integrated Circuit (IC) manufacturers. There are many factors affecting the IC yield. One is the total number of defects on a wafer. As the wafer size inc...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48935418055244694513 |