The Study of Low temperature Oxides and Vertical Polysilicon Thin-Film Transistors
博士 === 國立交通大學 === 電子工程系 === 92 === In this thesis, the low temperature oxides and vertical polysilicon thin-film transistors are studied. Firstly, the low temperature PECVD (plasma enhanced chemical vapor deposition) oxides deposited on single crystalline silicon are investigated. The oxide deposite...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/67793594996079918618 |