The research of Radio-Frequency Metal-Insulator-Metal capacitor using high-k as dielectrics

博士 === 國立交通大學 === 電子工程系 === 92 === As the very large scale integration (VLSI) technology continues to be scaled down, both the cut-off frequency fT and the device size of radio frequency (RF) metal-oxide-semiconductor field-effect transistors (MOSFETs) are improved, allowing them to be us...

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Bibliographic Details
Main Authors: Ming Yi Yang, 楊明誼
Other Authors: Albert Chin
Format: Others
Language:en_US
Published: 2004
Online Access:http://ndltd.ncl.edu.tw/handle/23776245079558317645