Assessment of Fire Protection Performance of Water Mist Applied in Exhaust Ducts of Semiconductor Fabrication Process
碩士 === 國立交通大學 === 產業安全與防災學程碩士班 === 92 === As facing the pressures from the continuous development of semiconductor industry, renew of process tool technology, and the trend of international competition, how to make the high cost semiconductor fabrication plant be safer, stable, efficient, and enviro...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/88007654766454496594 |