Tool Planning Approaches Considering Cycle Time Constraints In Wafer Foundries
博士 === 國立交通大學 === 工業工程與管理系所 === 92 === The tool planning problem is to determine how many tools should be allocated to each tool group to meet some objectives. An effective planning will provide a toolset, which has lower cost for procurement and yields good performance. This paper addresses three t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/9cdp8n |