Fabrication and Characterization of Polysilicon Thin Film Transistors with Multiple Nano-wire Channels

碩士 === 國立交通大學 === 電子工程系所 === 92 === We have studied the gate controllability of lightly-doped drain (LDD) polycrystalline silicon thin-film transistors (poly-Si TFTs) with multiple channels and different widths. We deserve that devices with an LDD structure exhibit low leakage current. Additionally,...

Full description

Bibliographic Details
Main Authors: Chi-Shen Chen, 陳稚軒
Other Authors: S.M. Sze
Format: Others
Language:en_US
Published: 2004
Online Access:http://ndltd.ncl.edu.tw/handle/seydkc