The Electrical Characteristics and Reliability of Ultrathin Oxynitride Grown by ICP Plasma
碩士 === 國立交通大學 === 電子工程系所 === 93 ===
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37131069656754573365 |