The Electrical Characteristics and Reliability of Ultrathin Oxynitride Grown by ICP Plasma
碩士 === 國立交通大學 === 電子工程系所 === 93 ===
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| Language: | en_US |
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2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37131069656754573365 |
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ndltd-TW-092NCTU5428003 |
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ndltd-TW-092NCTU54280032016-06-03T04:14:18Z http://ndltd.ncl.edu.tw/handle/37131069656754573365 The Electrical Characteristics and Reliability of Ultrathin Oxynitride Grown by ICP Plasma 以感應耦合式電漿系統成長之超薄氮氧化矽薄膜的電特性與可靠度研究 Bo-Ning Chen 陳柏寧 碩士 國立交通大學 電子工程系所 93 Kow-Ming Chang Cheng-May Kwei 張國明 桂正楣 2004 學位論文 ; thesis 74 en_US |
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NDLTD |
| language |
en_US |
| format |
Others
|
| sources |
NDLTD |
| description |
碩士 === 國立交通大學 === 電子工程系所 === 93 ===
|
| author2 |
Kow-Ming Chang |
| author_facet |
Kow-Ming Chang Bo-Ning Chen 陳柏寧 |
| author |
Bo-Ning Chen 陳柏寧 |
| spellingShingle |
Bo-Ning Chen 陳柏寧 The Electrical Characteristics and Reliability of Ultrathin Oxynitride Grown by ICP Plasma |
| author_sort |
Bo-Ning Chen |
| title |
The Electrical Characteristics and Reliability of Ultrathin Oxynitride Grown by ICP Plasma |
| title_short |
The Electrical Characteristics and Reliability of Ultrathin Oxynitride Grown by ICP Plasma |
| title_full |
The Electrical Characteristics and Reliability of Ultrathin Oxynitride Grown by ICP Plasma |
| title_fullStr |
The Electrical Characteristics and Reliability of Ultrathin Oxynitride Grown by ICP Plasma |
| title_full_unstemmed |
The Electrical Characteristics and Reliability of Ultrathin Oxynitride Grown by ICP Plasma |
| title_sort |
electrical characteristics and reliability of ultrathin oxynitride grown by icp plasma |
| publishDate |
2004 |
| url |
http://ndltd.ncl.edu.tw/handle/37131069656754573365 |
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