The Study of High Speed Tooling Parameters on Micro Channel Machining
碩士 === 國立交通大學 === 機械工程系所 === 92 === On behalf to the advantage of semiconductor process technology applications, more and more mechanical units are designed and manufactured scaling down. However, most of the semiconductor process technologies are not suitable for the work piece production in the r...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/81265114756537636626 |