Nanopositioning of Piezotube and Its Application to Scanning Probe Microscopy
碩士 === 國立交通大學 === 機械工程系所 === 92 === In the field of nanotechnology, scanning probe microscopy (SPM) is an indispensable tool. In order to be portable, this study uses a PZT tube instead of a PZT stage to scan a two-dimensional plane. This thesis aims to control the bending displacement of a PZT tube...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/29538603823420975369 |