Nanopositioning of Piezotube and Its Application to Scanning Probe Microscopy

• Main Authors: Jen-Te Liang, 梁仁德
• Other Authors: Tzong-Shi Liu
• Format: Others
• Language: zh-TW
• Published: 2004
• Online Access: http://ndltd.ncl.edu.tw/handle/29538603823420975369

碩士 === 國立交通大學 === 機械工程系所 === 92 === In the field of nanotechnology, scanning probe microscopy (SPM) is an indispensable tool. In order to be portable, this study uses a PZT tube instead of a PZT stage to scan a two-dimensional plane. This thesis aims to control the bending displacement of a PZT tube with nano precision, and apply it to a probe head in SPM. At first, this study verified feasibility of using strain gauges for sensing bending displacement. The experimental setup contains xPC Target with a MATLAB software and an I/O card for real time control. Sliding mode control, which is robust with respect to model uncertainty and noise, is used for positioning. Finally, by scanning a standard sample, the PZT tube is applied to a probe head in scanning tunneling microscopy. It demonstrates in experiments that scanning resolution of 4.9 nm is achieved. This research result can also be directly applied to atomic force microscopy, as long as the probe head is replaced.