The Development of SECS Communication Module for Cluster Tools and Photoelectric Process Equipments
碩士 === 國立交通大學 === 機械工程系所 === 92 === In this thesis, we use Object-Oriented Analysis/Design (OOA/D) method to develop an Independent-Interface SECS Communication Module Controller (i-SECS) that conforms to SEMI standard. The main point is to use Unified Modeling Language (UML) and Design Patterns to...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/7mxut4 |