Effects of process parameters on characteristics and biocompatibility of AlN thin film
碩士 === 國立交通大學 === 機械工程系所 === 92 === In this research, aluminum nitride thin film was deposited by sputtering. The piezoelectric properties of the aluminum nitride thin film can promote the effort of surface acoustic wave biosensor and it has excellent biocompatibility. Aluminum nitride thin film was...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/68118371910170233649 |