Study of Embedded Materials of Attenuated Phase-Shifting Mask and Simulation of Imaging by Dipole Off-Axis Illumination
碩士 === 國立交通大學 === 應用化學系所 === 92 === Embedded attenuated phase-shifting mask (EAPSM) and off-axis illumination (OAI) are most popular resolution enhancement techniques (RETs). Hence, we do some research to these two techniques in this paper. The points of the first part are optical properties of mate...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/52237924768457294660 |