The application of nano-sized bubble flotation technology on the treatment of CMP wastewater of the semiconductor manufactory
碩士 === 國立交通大學 === 環境工程系所 === 92 === Semiconductor industry has been a sector of importance and leading edge for economy development in Taiwan and elsewhere for the past several decades and in future. Generally, a large number of complex and highly delicate processes are employed in the semiconducto...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2004
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Online Access: | http://ndltd.ncl.edu.tw/handle/69byxx |