White-light Achromatic Phase Shifting Interferometry for Three Dimension Surface Profile Measurement
碩士 === 國立交通大學 === 光電工程系所 === 92 === This work focuses on the abilities of white-light phase-shifting interferometry (WLPSI) in 3-D surface profile measurement. We set up a Linnik type interferometric microscope in which an achromatic phase-shifting method with rotating waveplate is used. A quartz...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/12748259146553563444 |