A prototype of gene-chip based on electrical detection
碩士 === 國立中央大學 === 電機工程研究所 === 92 === In this research, we make comb-shape electrodes using semiconductor process. One pair of electrodes is two electrodes, and the distance between them is several micro-meter. Electrodes are like capacitance structure of VLSI. The surface was treated by surface chem...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2004
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Online Access: | http://ndltd.ncl.edu.tw/handle/84979746600486090103 |