Residual Stress Measurement of Actuating Plane in Micromirror
碩士 === 國立中央大學 === 機械工程研究所 === 92 === Abstract In this study, in order to make the material reaching qualities of strength and toughness, so select aluminum nitride to do the hinge of micromirror actuator. In fabrication produce, to deposition and manufacture the contact holes and hinges by reactive...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/11922249086731964944 |