| Summary: | 碩士 === 國立中央大學 === 機械工程研究所 === 92 === Abstract
In this study, in order to make the material reaching qualities of strength and toughness, so select aluminum nitride to do the hinge of micromirror actuator. In fabrication produce, to deposition and manufacture the contact holes and hinges by reactive sputtering deposition. By this way can improve the problem of membranes etched by hydrofluoric acid after selectivity tungsten deposition. To adjust deposition power and nitrogen flow rate also can confer the change in characters of aluminum nitride membranes for different nitrogen flow rate, including the thermal stresses, sheet resistances, and hardness that cased by membrane.
Furthermore, in order to understand the compose components, and lattice space in aluminum nitride membranes, used the X-ray powder diffractometer to analyze the phase structure in membranes. Employing the lattice space that measured in front and behind of sacrifical layer released, could calculate the residual stress value that cased from membrane, investigating the influences to fabrication process. And we could get that a twenty percent nitrogen flow and 1500 watts plasma power would cause a tensile force in actuating plane material.
|
|---|
