Discharge Mode Effect on Spin Coating

碩士 === 國立中央大學 === 機械工程研究所 === 92 === In order to give performance extremely, liquid spreading on spinning need to be figured out through diverse flowing conditions associated with discharge mechanisms. These experimental studies of different discharging modes include released drop, center injection,...

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Bibliographic Details
Main Authors: Chih-Pao Chang, 張志寶
Other Authors: Fu-Chu Chou
Format: Others
Language:en_US
Online Access:http://ndltd.ncl.edu.tw/handle/00647005213793471460