鑄型穿隧式磁阻元件之製作研究
碩士 === 國立彰化師範大學 === 物理學系 === 92 === The objective of this thesis is mainly to investigate the fabrication process of patterned tunneling magnetoresistance devices. Through top-down processes, including optical and electron beam lithography、ion-milling、reactive ion etching、sputtering and thermal evap...
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| Format: | Others |
| Language: | zh-TW |
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2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80410748351801754949 |