可撓式塑膠基板濺鍍透明導電AZO(ZnO:Al)薄膜之結構與光電性質研究
碩士 === 國立彰化師範大學 === 機電工程學系 === 92 === The aims of the study were to investigate the effects of process parameters on electrical and optical properties of AZO (ZnO : Al) thin films by radio frequency(RF) magnetron sputtering on flexible PES (Polyethersulfone) substrates. The processes include RF powe...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53553303779453027734 |