可撓式塑膠基板濺鍍透明導電AZO(ZnO:Al)薄膜之結構與光電性質研究

• Main Authors: Ming -Tso Chen, 陳銘佐
• Other Authors: Yi - Cheng Lin
• Format: Others
• Language: zh-TW
• Published: 2004
• Online Access: http://ndltd.ncl.edu.tw/handle/53553303779453027734

碩士 === 國立彰化師範大學 === 機電工程學系 === 92 === The aims of the study were to investigate the effects of process parameters on electrical and optical properties of AZO (ZnO : Al) thin films by radio frequency(RF) magnetron sputtering on flexible PES (Polyethersulfone) substrates. The processes include RF power, working pressure and substrate bias, respectively. The resistivity and transmittance of films were measured by four-point probe and spectrophotometer. The crystalline of films was analyzed with X-ray diffractiometer and transmission electron microscope. Besides, the thickness of film was measured by scanning electron microscope with the new developed low temperature fragment mechanism for flexible substrates. The experimental results shown that the new developed low temperature fragment mechanism can be used in measuring the thickness of flexible PES sample. The crystalline and resistivity of films are improved with increasing RF power but the transmittance of films is not good agreement with the increase of RF power. Beside, the worse crystalline and resistivity of films are obtained when RF power is in excess of 200W. The crystalline, resistivity and transmittance of films were improved with increasing working pressure. In addition, bias added has not help to increases crystalline, electrical and optical properties of films. The optical band gap of films shall be narrowed with increase of bias added from –25 to –50V. The better results of 1.5x10-2Ωcm resistivity of and 90％ transmittance are found in this study.