射頻磁控濺鍍透明導電膜AZO/AgPd/AZO複層薄膜特性分析
碩士 === 國立彰化師範大學 === 機電工程學系 === 92 === The aims of the study were to investigate the effects of process parameters on electrical and optical properties of AZO(ZnO:Al) and AgPd multi-layer films by radio frequency(RF) magnetron sputtering on type 1737F Corning glass. The processes include RF power, su...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/50105303057564416235 |