Structure and photocatalysis of undoped and nitrogen-doped titanium oxide films by reactive sputtering
碩士 === 國立東華大學 === 材料科學與工程學系 === 92 === Abstract Titanium oxide (TiO2) and nitrogen-doped titanium oxide (TiO2-xNx ) films were synthesized by reactive d.c.-magnetron sputtering using Ti metal target in plasma of Ar+O2 and Ar+O2+N2 mixtures, respectively. The experimental parameters include substra...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77027022955770915635 |