Structure and photocatalysis of undoped and nitrogen-doped titanium oxide films by reactive sputtering

碩士 === 國立東華大學 === 材料科學與工程學系 === 92 === Abstract Titanium oxide (TiO2) and nitrogen-doped titanium oxide (TiO2-xNx ) films were synthesized by reactive d.c.-magnetron sputtering using Ti metal target in plasma of Ar+O2 and Ar+O2+N2 mixtures, respectively. The experimental parameters include substra...

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Bibliographic Details
Main Authors: Hung-Pang Chou, 周宏邦
Other Authors: Ming-Show Wong
Format: Others
Language:zh-TW
Published: 2004
Online Access:http://ndltd.ncl.edu.tw/handle/77027022955770915635

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