Growth and Characterization of ZnO Thin Film by Reactive Sputtering
碩士 === 國立中山大學 === 材料科學研究所 === 92 === Transparent conductive aluminum-doped zinc oxide(AZO) thin films were synthesized by reactive RF magnetron co-sputtering system with metallic zinc and aluminum targets under oxygen atmosphere. Systematic study on the fixed sputtering power of the Zinc target (PZn...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/83644038135741118290 |