The Study of LiTaO3 Pyroelectric Thin Film IR Detectors Prepared by the Sol-Gel Process with Various Annealing Treatments
碩士 === 國立中山大學 === 電機工程學系研究所 === 92 === The lithium tantalite [LiTaO3, abbreviated to LT] thin films were deposited on Pt/Ti/SiO2/Si substrates by spin coating with sol-gel technology and various rapid thermal processing in this thesis. By changing the annealed layers and heating temperature(500~800℃...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/00290455570782927295 |