Nonlinear Static and Dynamic Characteristics of Electrostatic Micro-actuators
博士 === 國立中山大學 === 機械與機電工程學系研究所 === 92 === This dissertation performs a simulation investigation into the nonlinear static and dynamic characteristics of electrostatically driven shaped micro-actuators in micro-electro-mechanical systems (MEMS). The model proposed in the current nonlinear pull-in def...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/28398636748646704190 |