A Study on the Mechanism Design and Analysis of Microstages for Microassembly
碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 92 === Accompanying with the development of MEMS technology, microstages have been used for many years. Most of the studies on microstages have been aimed at the application of new actuators, materials and fabrication process in recent years. However, the syste...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/70805566890100641823 |