| Summary: | 碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 92 === Accompanying with the development of MEMS technology, microstages have been used for many years. Most of the studies on microstages have been aimed at the application of new actuators, materials and fabrication process in recent years. However, the systematic way for designing new microstages with the mechanism conceptual design approach still needs some more input.
The objective of this study is to establish a methodology to design new microstages employing the concept of mechanism design. First of all, new microstages for microassembly have been analyzed according to the basic requirements from the mechanism. Afterwards, the concept of microjoint has been presented and used in the synthesis of microstages. Besides, a flow chart of design procedure has been presented and seven kinds of microstages are achieved accordingly. Finally, the FEM simulation of the synthesized microstage illustrates the desirable results that reveal the good agreement with the expected motion. It is shown that this study can be efficiency applied to the design of micro scale devices.
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