Study of vibrational structure of vibration-based microgenerator

碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 92 === The main components of the vibration-based microgenerator incorporate vibratile structure, magnetic thin film, and coils. In this thesis work, bulk-micromachining technology and laser-micromachining technology were used to fabricate the vibratile structure o...

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Bibliographic Details
Main Authors: Chih-Wei Hsieh, 謝志瑋
Other Authors: Cheng-Tang Pan
Format: Others
Language:zh-TW
Published: 2004
Online Access:http://ndltd.ncl.edu.tw/handle/80537360038039425709