Analysis and research of an ultra-precision XY positioning stage
碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 92 === Abstract This paper reports about a precision positioning XY stage utilizing flexure hinges and piezoelectric actuators. XY stage was designed with the aim of reducing the stress-concentration of flexure hinges and the low interference between two actuating...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/40235909107090984806 |