Treatment of Chemical Mechanical Polishing Wastewater by a Simultaneous Electrocoagulation/Electrofiltration Process
碩士 === 國立中山大學 === 環境工程研究所 === 92 === In this work, a novel treatment module capable of simultaneously enacting electrocoagulation and electrofiltration was designed, fabricated, and tested aiming for the reclamation of CMP (chemical mechanical polishing) wastewater. In general, CMP wastewater conta...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/54445309726098249033 |