A Diagnostic Analysis for the Yield Characteristic Value Model Based on Engineering Data in Semiconductor Manufacturing
博士 === 國立清華大學 === 工業工程與工程管理學系 === 92 === Most of the existing yield enhancement techniques used by semiconductor manufacturing companies lack integration and are therefore inefficient. Engineers from different departments must analyze large amounts of engineering data and spend a great deal of time...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2004
|
Online Access: | http://ndltd.ncl.edu.tw/handle/63011331847650415317 |