Interfacial Reactions of Fe Thin Films on Ion Implanted Silicon
博士 === 國立清華大學 === 材料科學工程學系 === 92 === The formation of iron silicides on (111)Si and effects of BF2+-, As+-and P+-implantation on the phase transformation have been investigated by sheet resistance measurements, grazing incidence x-ray diffractometry, transmission electron microscopy, ene...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/30922175224386171247 |