The study of the superpolish procedure on the surface of the sapphire wafer for epitaxial purpose
碩士 === 國立清華大學 === 工程與系統科學系 === 92 === In this experimental, the relation between the process of superpolish and the micro-roughness on the surface of sapphire wafer was the purpose we studied. The major purpose of this study is to develop the process of fabricating the sapphire wafer suit...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/52669226783821038895 |