The study of the superpolish procedure on the surface of the sapphire wafer for epitaxial purpose
碩士 === 國立清華大學 === 工程與系統科學系 === 92 === In this experimental, the relation between the process of superpolish and the micro-roughness on the surface of sapphire wafer was the purpose we studied. The major purpose of this study is to develop the process of fabricating the sapphire wafer suit...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2003
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Online Access: | http://ndltd.ncl.edu.tw/handle/52669226783821038895 |