Tool Capacity Planning Analysis Under Uncertain Environment in Semiconductor Manufacturing

碩士 === 國立清華大學 === 工業工程與工程管理學系 === 92 === In the semiconductor industry, machine tools purchases require an enormous amount of capital, which is approximate 60-70% of initial fab expenses for machine tools. Therefore the semiconductor manufacturing companies are faced on important capital investment...

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Bibliographic Details
Main Author: 張晏蓉
Other Authors: Ue-Pyng Wen
Format: Others
Language:en_US
Published: 2004
Online Access:http://ndltd.ncl.edu.tw/handle/62151886630886207182