Effects of adhesion layers on the microstructure and characteristics of SrBi2Ta2O9 ferroelectric memories
博士 === 國立清華大學 === 材料科學工程學系 === 92 === The effects of titanium (Ti) or tantalum (Ta) adhesion layer on the ferroelectric and microstructural properties of metal-organic decomposition (MOD)-derived SrBi2Ta2O9 (SBT) films are investigated. It is found that the atoms of adhesion layer play a significant...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/4862gd |