Study of Nickel Induced a-Silicon Crystallization and Tantalum Silicide nanowires
碩士 === 國立清華大學 === 材料科學工程學系 === 92 === Silicon based semiconductor materials are widely used material in electronics industry. Silicides have been extensively studied to the past several decades. In this study, metal induced crystallization of amorphous silicon and synthesis of tantalum silicide nano...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91506020816812922487 |