A Study of Polishing Technique for CVD DiamondThin Films—Thermo chemical Polishing andChemical-Assisted Mechanical Polishing andPlanarization
碩士 === 國立清華大學 === 動力機械工程學系 === 92 === Chemical vapor deposited diamond thin firm technique is generally applied in the years. Because of the characteristic of polycrystalline diamond, it must be polished in final processes to improve the quality of surface for widely application. In many polishing t...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77230053617430858559 |