Optimization of the Hydrogenated Amorphous Silicon P-I-N Sensor Diode for Bio-Medical Detection
碩士 === 國立清華大學 === 電子工程研究所 === 92 === Using Plasma-Enhanced Chemical Vapor Deposition (PECVD) system to deposit a-Si:H p-i-n photo diode or photovoltaic solar cell is very common. In order to manufacture higher performance photo diode, we first analyze the optical and electrical properties of the mos...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71511981290312957384 |