Effect of heat treatment under controlled atmosphere on the properties of ZrN film deposited by HCD ion plate
碩士 === 國立清華大學 === 工程與系統科學系 === 92 === Heat treatment processes were applied to enhance the characteristics of ZrN thin films. In this study, ZrN films were deposited on AISI D2 steel using a hollow cathode discharge ion-plating (HCD-IP) technique. Heating environment, including air, Ar/H2, and Zr an...
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| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/4pfyvz |