Theory Analysis and Verification of Variable-Angle Spectroscopic Ellipsometry Systems

碩士 === 國立臺灣師範大學 === 工業教育研究所 === 92 === Coating technology has played an important role in optics, opto-electronics, semiconductor industries, etc. For example, a lens is usually treated with anti-reflection coating in traditional optical industry. In the industry of fiber-optics communication, the k...

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Bibliographic Details
Main Authors: Hong-Da Jian, 簡宏達
Other Authors: Gao-Wei Chang
Format: Others
Language:en_US
Published: 2004
Online Access:http://ndltd.ncl.edu.tw/handle/10016166299412103020