The Characterization and Fabrication of Pyroelectric Infrared image Sensor
碩士 === 國立臺灣海洋大學 === 電機工程學系 === 92 === Abstract In this paper, the integrated Pyroelectric Infrared image Sensors have been made using a Ca-Modified Lead Titanate (Pb0.7Ca0.3TiO3, PCT) thin films by RF sputtering method on silicon substrate. In addition, the etching technology is used to increase th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25581533502000938825 |