Fabrication and Characterization of the Metal-Semiconductor Thin-Film Infrared Thermopile Sensors
碩士 === 國立臺灣海洋大學 === 電機工程學系 === 92 === Abstract A multi-layer technology for manufacturing thin – film thermopile sensor is investigated. The device uses a series – connected of thermocouples whose hot junctions are supported on a membrane formed using anisotropic etching. This study reports a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/21351649523580713592 |