利用數值方法解析IC產業無塵室空氣流場之研究
碩士 === 國立臺灣海洋大學 === 機械與輪機工程學系 === 92 === Abstract Because the production technology is developing continuously, the quality of production and precision is demanded rigor and rigor. Therefore, controlling the cleanliness is very important during the process of production. In order to make a bett...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/30985209008137290779 |