Silicon based nano-structure field emission light emitting device

碩士 === 國立臺灣大學 === 電子工程學研究所 === 92 === Abstract In this thesis, we develop the silicon based metal nano-pillar structure and silicon dry etching nano-pillar structure. Then use the phosphor and vacuum system to make the main field emission display(FED) device. In my experience t...

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Bibliographic Details
Main Authors: Yu-Lun Su, 蘇郁倫
Other Authors: Qing-Fu Lin
Format: Others
Language:zh-TW
Published: 2004
Online Access:http://ndltd.ncl.edu.tw/handle/75876755704016265611