Fault Detection and Classification by Sample Covariance Matrix and Its Applications to Plasma Etcher
碩士 === 國立臺灣大學 === 工業工程學研究所 === 92 === The variabilities and complex relationships of semiconductor equipment variables can be characterized by the sample covariance matrix. Fault detection and classification (FDC) via sample covariance matrix is thus very important. However, the modern high-mix low-...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/29727777144399325106 |